REVIEW OF THE STRUCTURE AND THE PRINCIPLE OF WORK OF THE FOCUS SENSOR

  • Ростислав Орестович Волицький National University "Lviv Polytechnic"
  • Ростислав Ярославович Мастило Ilmenau University

Abstract

As part of this study was to examine the current state of contemporary focus detection, considered various methods of focusing principle, advantages and disadvantages of these methods. The detailed analysis of the principle of focus sensor and its characteristics. An illustrative example of using the sensor as a focal zero-indicator and its advantages over other types of sensors in nano measurements

Author Biographies

Ростислав Орестович Волицький, National University "Lviv Polytechnic"

Graduate student

Ростислав Ярославович Мастило, Ilmenau University

Candidate of Technical Sciences, Researcher

Published
2019-02-21
Section
Metrology, Standardization and Certification